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MEMS Sensor (Inertial)

Product Overview

The accelerometer is a surface micro machined integrated circuit accelerometer. The device consists of a surface micro machined capacitive sensing cell (g-cell) and a CMOS signal conditioning SIC contained in a single integrated circuit package. The sensing element is sealed hermetically at the wafer level using a bulk micro machined "cap'' wafer.


· Temperature Compensated Over 0°C to +85°C
· Unique Silicon Shear Stress Strain Gauge
· Unique Silicon Shear Stress Strain Gauge
· Radiometric to Supply Voltage
· Differential and Gauge Options
· ±0.25% Linearity

Key Features
 Package Type  Accelerometer 20  Accelerometer 16
 Lead count available  20  16
 Lead frame Material  Cu  Cu
 Body Size (mm)  7.5x12.8  7.6x10.45
 Overall thickness**(mm)  Max3.55  Max3.55
 Lead pitch(mm)  1.27  1.27

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