Product Overview   The accelerometer is a surface micro machined integrated circuit accelerometer. The device consists of a surface micro machined capacitive sensing cell (g-cell) and a CMOS signal conditioning SIC contained in a single integrated circuit package. The sensing element is sealed hermetically at the wafer level using a bulk micro machined "cap'' wafer. Features   · Temperature Compensated Over 0°C to +85°C · Unique Silicon Shear Stress Strain Gauge · Unique Silicon Shear Stress Strain Gauge · Radiometric to Supply Voltage · Differential and Gauge Options · ±0.25% Linearity   Key Features  Package Type  Accelerometer 20  Accelerometer 16  Lead count available  20  16  Lead frame Material  Cu  Cu  Body Size (mm)  7.5x12.8  7.6x10.45  Overall thickness**(mm)  Max3.55  Max3.55  Lead pitch(mm)  1.27  1.27

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