MEMS Sensor (Inertial)
Pressure Sensor
MEMS Sensor (Inertial)
Product Overview
 

The accelerometer is a surface micro machined integrated circuit accelerometer. The device consists of a surface micro machined capacitive sensing cell (g-cell) and a CMOS signal conditioning SIC contained in a single integrated circuit package. The sensing element is sealed hermetically at the wafer level using a bulk micro machined "cap'' wafer.

Features
 

， Temperature Compensated Over 0‘C to +85‘C
， Unique Silicon Shear Stress Strain Gauge
， Unique Silicon Shear Stress Strain Gauge
， Radiometric to Supply Voltage
， Differential and Gauge Options
， ‐0.25% Linearity
 
Key Features
 Pkg type  Accelerometer 20  Accelerometer 16  Gemini  Nova  Smoke IC
 Lead count available  20  16  20  14  16
 Lead frame Material  Cu  Cu  Cu  Cu  Cu
 Body with (mm)  7.5x12.8  7.6x10.45  7.6x12.95  6.05x9.55  6.85x19.55
 Overall thickness**(mm)  Max3.55  Max3.55  Max2.65  Max3.37  Max7.74
 Lead pitch(mm)  1.27  1.27  1.27  1.27  2.54